000 01032nam a22003257a 4500
005 20230512223047.0
008 190425t xxu||||| |||| 00| 0 eng d
020 _a9781119053835
040 _cCSPC
082 0 _a621.381
_bC813m
100 _aCorigliano, Alberto
_eauthor.
245 0 0 _aMechanics of microsystems
_cAlberto Corigliano
260 _aNew Jersey:
_bJohn Wiley & Sons,
_c2018.
300 _axxiii, 397 pages:
_bfigures, tables;
_c26 cm.
336 _2rdacontent
_atext
337 _2rdamedia
_aunmediated
338 _2rdacarrier
_avolume
500 _aIncludes index.
504 _aIncludes bibliographical references.
650 1 0 _aMicroelectromechanical systems.
700 1 _aArdito, Raffaele
_eauthor.
700 1 _aComi, Claudia
_eauthor.
700 1 _aFrangi, Attilio
_eauthor.
700 1 _aGhisi, Aldo
_eauthor.
700 1 _aMariani, Stefano
_eauthor.
940 _aLenie
942 _cBOOK
_jCIR 621.381 C813m 2018
999 _c7923
_d7923