| 000 | 01032nam a22003257a 4500 | ||
|---|---|---|---|
| 005 | 20230512223047.0 | ||
| 008 | 190425t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781119053835 | ||
| 040 | _cCSPC | ||
| 082 | 0 |
_a621.381 _bC813m |
|
| 100 |
_aCorigliano, Alberto _eauthor. |
||
| 245 | 0 | 0 |
_aMechanics of microsystems _cAlberto Corigliano |
| 260 |
_aNew Jersey: _bJohn Wiley & Sons, _c2018. |
||
| 300 |
_axxiii, 397 pages: _bfigures, tables; _c26 cm. |
||
| 336 |
_2rdacontent _atext |
||
| 337 |
_2rdamedia _aunmediated |
||
| 338 |
_2rdacarrier _avolume |
||
| 500 | _aIncludes index. | ||
| 504 | _aIncludes bibliographical references. | ||
| 650 | 1 | 0 | _aMicroelectromechanical systems. |
| 700 | 1 |
_aArdito, Raffaele _eauthor. |
|
| 700 | 1 |
_aComi, Claudia _eauthor. |
|
| 700 | 1 |
_aFrangi, Attilio _eauthor. |
|
| 700 | 1 |
_aGhisi, Aldo _eauthor. |
|
| 700 | 1 |
_aMariani, Stefano _eauthor. |
|
| 940 | _aLenie | ||
| 942 |
_cBOOK _jCIR 621.381 C813m 2018 |
||
| 999 |
_c7923 _d7923 |
||