TY  - BOOK
AU  - Corigliano, Alberto
AU  - Ardito,Raffaele
AU  - Comi,Claudia
AU  - Frangi,Attilio
AU  - Ghisi,Aldo
AU  - Mariani,Stefano
TI  - Mechanics of microsystems
SN  - 9781119053835
U1  - 621.381 
PY  - 2018///
CY  - New Jersey
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
N1  - Includes index; Includes bibliographical references
ER  -