TY  - BOOK
TI  - Micro electro mechanical systems (MEMS)
SN  - 9781680948455
U1  - 621 
PY  - 2018///
CY  - New York
PB  - 3G E-Learning
KW  - Microelectromechanical systems
N1  - Includes index; Includes bibliographical references
ER  -