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Mechanics of microsystems

Corigliano, Alberto

Mechanics of microsystems Alberto Corigliano - New Jersey: John Wiley & Sons, 2018. - xxiii, 397 pages: figures, tables; 26 cm.

Includes index.

Includes bibliographical references.

ISBN: 9781119053835

Subjects--Topical Terms:
Microelectromechanical systems.

Dewey Class. No.: 621.381 / C813m

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